During IEEE’s International Electron Devices Meeting (IEDM) conference, imec reported for the first time the CMOS integration of vertically stacked gate-all-around (GAA) silicon nanowire MOSFETs. Key in the integration scheme is a dual-work-function metal gate enabling matched threshold voltages for the n- and p-type devices. Also, the impact of the new architecture on intrinsic ESD performance was studied, and an ESD protection diode is proposed. These results advance the development of GAA nan...